MODIFICATION OF ELECTRONIC MATERIALS WITH MeV IONS
نویسندگان
چکیده
منابع مشابه
STRAIN/DAMAGE IN CRYSTALLINE MATERIALS BOMBARDED BY MeV IONS: RECRYSTALLIZATION OF GaAs BY HIGH-DOSE IRRADIATION
MeV ion irradiation effects on semiconductor crystals, GaAs(lOO) and Si (111) and on an insulating crystal CaF 2 (111) have been studied by the x-ray rocking curve technique using a double crystal x-ray diffractometer. The results on GaAs are particularly interesting. The strain developed by ion irradiation in the surface layers of GaAs <1go> ~aturates to a certain level after a high dose irrad...
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ژورنال
عنوان ژورنال: Le Journal de Physique Colloques
سال: 1989
ISSN: 0449-1947
DOI: 10.1051/jphyscol:1989201